Physics | Engineering internship: electron optical sensitivity simulations

Introduction At ASML’s Delft office, you will join a team developing a multi-beam electron microscope used to inspect semiconductor wafers during production. A key part of this system is a micro-electromechanical (MEMS) module that shapes and directs electron beams. Small manufacturing variations in this module can influence electron optics performance, including beam focus and alignment. Understanding these effects is essential for designing reliable and robust products. During the internship,…